性能优势
· Coating deposition carried out using a high density of low energy bombarding i
使用高密度低能量轰击离子进行沉积镀膜。
· Deposition of very dense, non-columnar coating structures with low internal stresses.
镀层致密度好，低柱状晶结构，内应力低
· Deposition of coatings with dense structures at low temperatures.
• 可在低温环境下沉积致密结构的镀层
· High efficiency of ion cleaning resulting in coatings with the highest levels of adhesion.
率等离子清理以提供高的镀层结合强度。
· Coatings quality is assured by the use of specially designed Plaag sputter sources, which create an intense plaa and high ion bombardment of work pieces.
镀层品质保证是由使用专门设计plaag溅射源及提供高密度的等离子。