|
基本技术规格
|
| Stage Configuration |
# of Axes |
3-Axis ~ 5-Axis |
| Max. DUT Diagonal |
Mobile/10”/20”/30”/40”/50”/60”/70”/80”/100”+ |
| Measurement Axis |
Vertical/Horizontal |
| BLU Clamp Depth |
30mm ~ 120mm+ |
| BLU Fixture |
X or Y Centering Mechani*** (Engineering Plastic)/
Spring Support Gripper |
| Lamp Fixture |
Adjustable Centering Lamp Holder/Exchangeable Lamp Mount (Engineering Plastic) |
| Main Material |
Steel/Aluminium |
| Housing |
Open/Steel/Aluminium+Foamex/
Stainless Chamber (Temperature Control) |
| Motion Speed |
200mm/sec, 30°/sec (Max.) |
| Guide Rail |
LM-Guide/Linear Scale/Geared Head+Bearing |
| Drive System |
AC Servo Motor/Micro Stepping Motor |
| Drive Resolution |
100μm/50μm or lower, 1° or lower |
| Drive Repeatability |
&plu***n;50μm/&plu***n;0.016° or lower |
| Working Distance |
~ 500mm |
| LMD Fixture |
EDA(Easy Detector Alignment) Unit with X & Y Tilting |
| # of LMDs ***ailable |
1/ 2+ |
| LMD Opti*** |
Photometer/Spectroradiometer/
Time Resolved Device etc. |
SR-3/SC-777/BM-7/BM-7-Fast/BM-5A/CS-1000A/
PR-650/PR-705/PR-715/PR-880 etc. |
| View Finder etc. |
B/W CMOS/Color CCD/Laser Pointer etc. |
| DUT Drive Opti*** |
Programmable Power Supplies |
Agilent/Delta/Unicorn/Digital/VU Power etc. |
| Lamp Power Supplies |
NF’s AS-114B/AS-128/AS-129 Integration etc. |
| Digital Meters/Power Analyzer etc. |
Agilent/Keithley/Norma etc. |
| Ha***are Configuration |
Motion Controller |
AjinExtek/Samsung MMC etc. |
| PC Specification |
Intel Pentium-IV 2.8Ghz+, 17” LCD Monitor, Windows XP,Office 2003, HDD, CD-RW, Serial Multi-Port etc. |
Software
Configuration |
.Net Based Application/DBMS & SPC Support/Install CD etc. |
Supported
Standa*** |
VESA FPDM 2.0/TCO '99 & '03/DELL VSQ, ALS Testing/
ISO 13406-2/Custom Sequence etc.
|
| Delivery |
8 ~ 12 Weeks |
| Setup & Training |
3 ~ 6 days after delivery including training/Manual Review etc. |
| Technical Support |
Periodical maintenance visit (Inland only) 4 times within 1 Year after delivery |
|
Warranty
|
1 Year after delivery (except damages from user faults or disasters) |
