单晶硅片

Single Crystal Silicon Wafer 4” (Prime or Test wafer)

Diameter 100+/-0.3mm P/E Lapped or As-Cut

CZ N/P, N/As, N/Sb, P/B

Orientation (100), (111), (110)

Resistivity 2-4, 4.0-7.0, 7.5-12.5

Thickness 350+/-15 420+/-20 525+/-20um

PF Length 32.5+/-2.5 mm, SF 18.0+/-2.0 mm

RRV 12% max, TTV 15um max, TIR 10um max, Bow/Warp 40um max

2” 3” 4” Lapped, As-Cut and Polished wafer ***ailable.

25pcs in one cassette, carton box outside