- Tr***el ranges 25 to 85mm
- Resolution to 1μm per step
- Negligible backlash
- Low pro?le rigid c***truction
- Load capacity to 50kg
- Directly stackable for XYZ
- Suitable for use below 1 x 10-10 mBar
- Bakeable to 200°C
- Cross-roller bearing motion
- Diamond corrected leadscrew and matched nut
- Gamma radiation hard to 1 x 106 Gy versi*** ***ailable
- May be customised
-
Speci?cation
Unit
LTXL
LTXH
Tr***el
mm
25 / 55 / 85
25 / 55 / 85
Resolution in full step
μm
5
1
Max. Speed
mm/s
15
4
Recommended loaded speed in UHV
mm/s
2
0.8
Repeatability
μm
1
0.2
Load Capacity (Horizontal)
kg
50
50
Load moment
Nm
<20
<20
Axial load force @ 500Hz Iφ = 1A
kg
3
10
Backlash
μm
Negligible
Negligible
Roll, Pitch & Yaw (Unloaded)
μrad
<25
<25
Roll Compliance
μrad/Nm
5
5
Pitch & Yaw Compliance
μrad/Nm
2
2
Straightness of Tr***el
μm
<1.3μm / 100mm
<1.3μm / 100mm
Stepper Motor
D35.1
D35.1
Vacuum
mBar
1 x 10-10
1 x 10-10
Max. Temperature
°C
200
200
MTBF (5kg load and 30% duty cycle)
hrs
15,000
10,000