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数控冲床直线异步电机的机械特性与旋转异步电机的机械特性一样,随动子的导电电阻和气隙而变。其他特性也与旋转异步电机相似。由于直线异步电机的特殊定子、动子结构,使电机定子励磁电流分量较大,再加上气隙磁通密度很低,导致直线异步电机的特性差、损耗大、效率低。
③数控冲床直线同步电机直线同步电机的工作原理与旋转单极式同步电机一样,即定子合成移动磁场与动子行披磁场相互作用产生同步转矩(或力),带动负载做直线运动.直线同步电机分为励磁式和永磁式两种。由于直线同步电机的气隙磁通密度可以取得很大,因此其比推力、功率因数和效率都比直线异步电机好。直线异步电机应用的场合都可以用直线同步电机取代,且效果要好。
④数控冲床直线步进电机直线步进电机是由旋转步进电机演变而来,它通常制成感应子式和磁阻式两种形式,感应子式直线步进电机性能好,尺寸小,得到广泛应用。直线步进电机是利用定子和动子之间气隙磁导的变化所产生的电磁力而工作的。
数控冲床直线步进电机的静动态特性与参数和旋转步进电机的情况一样,两者的机械参数有类似的等效关系。如直线步进电机的推力、直线步距和动子质量对应旋转步进电机的转矩、步距角和转子转动惯量。其他特性和参数也都类似,只是旋转步进电机有精密的支承轴承,而直线步进电机没有,一个好的解决办法是采用气浮和流体支承,从而减小振动和噪声。
直线步进电机使用较广,如用在数控绘图仪、记录仪、数控刻图机、数控冲床、集成电路测量制造等设备上。
⑤平面式步进电机平面式步进电机由两个互相垂直运动的直线步进电机组合而构成。
它具有X、Y两个坐标轴,能在平丽内各个方向运动.其原理、结构和特性可参考直线步进电机。平面步进电机结构简单、性能好、成本低,在数控设备上得到较广泛的应用。
MKS MFC 2179A22CR1BV / N2 / 200 SCCM
AREA CA-98DU-Z, MFC ADAPTOR
AREA UN-NT-JB MFC ADAPTOR
Teledyne HFC-203, MFC,MAXIUM Working Pressure 500 Psig
UNIT UFC-1020A / 10 SLM / N2
MFC BROOKS 5964 / 10 SLPM / AR
MFC BROOKS 5964 / 20 SLPM / AR
MFC BROOKS 5964 / 2 SLPM / AR
UNIT UFC-1168A / N2 / 30 SLM
AREA CA-26A, MFC UI-NNT ADAPTOR
UNIT UFC-1100A / NH3 / 200 SCCM
MFC BROOKS 6256S / 1 SLPM / NF3
UNIT UFC-1660 / NF3 / 300CC
UNIT UFC-1660/ 3 SLM / NF3
MFC BROOKS 5964 / 30 SLPM / NH3
UNIT UFC-1260A / 500 SCCM / NH3
UNIT UFC-1100A / N2 / 5 SLM
MFC BROOKS 5964 / 500 SCCM / AR
UNIT UFC-8161 HE / CALIBRATED
PORTER NVL-003F, 0.5l / min TEOS, MFC( Mass Flow Contro
MFC BROOKS 5850E SERISES / 0~50 SCCM / SIH4
MFC(Masss Flow Controller) SEC-D114 , HORIBA STEC SEC-D
STEC MFC SEC-7450M / NH3 / 20 SLM
STEC MFC SEC-7450M / O2 / 20 SLM
BROOKS, GF125CXXC, GF125C-915206, MFC, GF125,SH46,WF6
STEC MFC SEC-7450M / N2O / 20 SLM
MFC BROOKS 5866 SERISES 5866RB1A1***Q2SA / 1 SLPM / AR/H
BROOKS SLA7950S1EGG1B2 MFC GAS : AR, FLOW RATE : 200 S
STEC MFC SEC-7450M / NH3 / 10 SLM
AREA FC-770AC / 2SLM / C2F6 / MFC
MFC BROOKS 5964 / 10 SLPM / GAS : NITROGEN
MFC BROOKS 5964 / 2 SLPM / C2F6
MFC STEC SEC-7440MD / SIH4 /1 SLM
AREA FC-770AC / 3SLM / O2 / MFC
MKS MFC 2159B-0020RV / AR / 200 SCCM
BROOKS SLA7950S1EGG1B2 MFC GAS : N2, FLOW RATE : 10 SL
MFC(Masss Flow Controller) SEC-D114 , HORIBA STEC SEC-D
BROOKS, GF125CXXC, GF125C-915207, MFC,GF125-SH44,B2H6 w
UNIT UFC-1660 , SF6, 200 SCCM
UNIT UFC-1660 , BCL3, 100SCCM
UNIT UFC-1160A / N2 / 2 SLM
STEC MFC SEC-7330, SIH4, 500 SCCM
MFC BROOKS 6256S / 1 SLPM / N2O
MFC MYKROLIS FC-260 / 6 SLPM / N2 / 150 PSIG MAX
MKS MFC 2159B-0020RV / N2 / 200 SCCM
AREA FC-980C MFC, O2, 200SCCM, Mass Flow Controller
UNIT UFC-1100A / SIH4 / 200 SCCM
UNIT UFC-1100 / SF6 / 200 SCCM
MFC BROOKS 5964 / 0~2 SLPM / N2
MFC UNIT UFC-8161 3.0L / HE-D
STEC MFC SEC-7450M / C2F6 / 5 SLM
UNIT UFC-1100 / SIH4 / 1000 SCCM
MFC MYKROLIS FC-260 / 0.2 SLPM / N2 / 150 PSIG MAX
MFC STEC SEC-7440/ CO / 100 SCCM
UNIT UFC-1100A / C2F6 / 5 SLM
UNIT UFC-1100 / N2 / 2 SLM
AREA FC-7810CD/ 5SLM (5000 SCCM) / GAS : C2F6
PORTER NVL-005F, 0.25l / min TEOS, MFC( Mass Flow Contr
AREA FC-980C MFC, HE, 1 SLM , Mass Flow Controller
HORIBA, STEC GP-100F, HE, 20SCCM , MFC, AUTO PRESSURE R
MFC BROOKS 5964 / 2 SLPM / O2
STEC MFC SEF-4550M / PH3 / 5 LM
PORTER NVL-004F, 0.2ml / min TEOS, MFC( Mass Flow Contr
MKS, 640A-15715, APC FLOW CONTROLLER TYPE 640
MFC TYLAN FC-2960 MEP5 / 20 SLPM / N2
UNIT UFC-1663 / 100CC / PH3
MFC BROOKS 5964 / 20 SLPM / GAS : NITROGEN
UNIT UFC-1160A / N2 / 5 SLM
MFC TYLAN FC-2960 MEP5 / 6 SLPM / N2
BROOKS SLA7950S MFC GAS : WF6, FLOW RATE : 5 SCCM, Mas
MFC TYLAN FC-2960 MEP5 / 0.1 SLPM / N2
MFC;P6A-28032,22-342513-00,Ar,10sccm,1-1/8' SURFAC
BROOKS SLA7950S1EGG1B2 MFC GAS : SH4, FLOW RATE : 2000
BROOKS SLA7950S1EGG1B2 MFC GAS : NF3, FLOW RATE : 15 S
AERA FCPA7800C, MFC, 750 SCCM, 5% B2H6/N2
BROOKS SLA7950S MFC GAS : SIH2CL2, FLOW RATE : 500 SCC
BROOKS, GF125CXXC, MFC, GF125-SH44-B2H6,w/ adptr 700359
MFC FC-2900 MEP5 / 300 SCCM / N2
HORIBA STEC, SEC-Z512MGX, 1SLM NH3 MFC
MKS EPCA-24592 CONTROLLER,CT5015-000010-11,2CH,AUXILIAR
HORIBA STEC, SEC-Z512MGX, 1SLM NH3 MFC
MFC;KSP1-050464,TN2920,CO2/N2 100SLPM
APPLIED MATERIALS, AMAT, 3030-14249,Celerity,DSVBD1XM
Brooks SLA7950S1EGG1B2A1 MFC, SIH4, 500 SCCM
BROOKS, GF125C, GF125C-924011, MFC, Gas: Range : 50 LPM
AERA, FCPI980***VX9TAA, MFC,FC-PIDA980C-4V-M7-500SCCM,50
Horiba Stec Inc., SEC-Z512MGX, MFC;SEC-Z512MGXOT1-MR.MG
AERA, FCPI981***VX9TAA, MFC, FC-PIDA980C-4V-M6-500SCCM,5
OLYMPUS MICROSCOPE MHL-AFCB/U AF CONTROL UNIT
Olympus SZ40 SZ4045CHI stereo microscope with *** Exwa
Semiconductor & PCB Equipment STEREOZOOM MICROSCOPE
Leitz Ergolux AMC Inspection Microscope
TELI CS3150 CCIR MACHINE VISION MACRO CAMERA SET
TOSHIBA X-RAY Image Intensifiers E5844H-P1K
*** PRECISE EYE AF VISION MICROSCOPE 3CCD CAMERA
TELI CS4200 CCIR MACHINE VISION MACRO CAMERA LED LIGHT
TELI CS5260 CCD CAMERA + TOKYO MACHINE VISION SCOPE
KYOWA MACHINE VISION MACRO LENS 0.4X-2X WITH CCD CAMERA
LEICA MS5 Microscope with led light